Publications
“Direct Fabrication of Large Micropatterned Single Crystals”, J. Aizenberg, D. A. Muller, J. L. Grazul, D. R. Hamann , Science, 299, 1205-1208 (2003).
“Dopant mapping for the nanotechnology age”, M. R. Castell, D. A. Muller & P. M.Voyles, Nature Materials 2, 129–131 (2003).
“Imaging individual atoms inside crystals with ADF-STEM”, P. M. Voyles, J. L. Grazul, D. A. Muller, Ultramicroscopy 96 251-273 (2003).
“Evidence for a New Class of Defects in Highly n-Doped Si: Donor-Pair-Vacancy-Interstitial Complexes”, P. M. Voyles, D. J. Chadi, P. H. Citrin, D. A. Muller, J. L. Grazul, P. A. Northrup, and H.-J. L. Gossmann, Phys. Rev. Lett. 91, 125505 (2003).
“Correlation of annealing effects on local electronic structure and macroscopic electrical properties for HfO2 deposited by atomic layer deposition”, G. D. Wilk and D. A. Muller, Appl. Physics Lett. 83 3984-3986 (2003).
"Morphology and Crystallization Kinetics in HfO2 Thin Films Grown by Atomic Layer Deposition", M.-Y. Ho, H. Gong, G.D. Wilk, B.W. Busch, M.L. Green, P.M. Voyles, D.A. Muller, M. Bude, W.H. Lin, A. See, M.E. Loomans, S.K. Lahiri, and P.I. Räisänen,. J.Appl. Phys. 93 1477-1483 (2003).
“Thin Dielectric Film Thickness Determination by Advanced Transmission Electron Microscopy”, A.C. Diebold, B. Foran, C. Kisielowski, D. A. Muller, S.J. Pennycook, E. Principe, and S. Stemmer, Microsc. Microanal. 9, 493–508, 2003
