Three-dimensional imaging of pore structures inside low-kappa dielectrics

pore structures inside low-kappa dielectrics

"Three-dimensional imaging of pore structures inside low-kappa dielectrics",
H. L. Xin, P. Ericus, K. J. Hughes, J. R. Engstrom, and D. A. Muller,
APL 96, 223108 (2010)"

Cornell Chronicle:Imaging sub-nano pore structures