Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si

individual dopant atoms and clusters

"Atomic-scale imaging of individual dopant atoms and clusters in highly n-type bulk Si",
P. M. Voyles, D. A. Muller, J. L. Grazul, P. H. Citrin, and H.-J. Gossmann,
Nature, 416 826-829 (2002).

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